等离子体清洗机

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PD-300等离子体清洗机

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产品概述:

等离子清洗机是一种表面处理设备, 用气体作为处理介质,它是利用能量转换技术以电能将气体转换为化学反应性和活性很高的气体等离子体,等离子体对固体样品表面进行相互作用,引起分子结构改变,从而对样品表面的有机污染物进行超清洗和使样品表面改性,以获得希望的表面特性。

详细信息
 等离子清洗机由真空腔体及等离子电源、抽真空系统、充气系统、控制系统等部分组成。清洗后得到了表面亲水性、拒水性、低摩擦、高度清洁、激活、蚀刻等各种表面改性。
 应用领域:
  1、该清洗系统广泛应用于光通信器件领域,用于金丝键合前处理清洗工艺,提供金丝键合性能有效提高器件使用寿命。
  2、清洗光学器件、电子元件、激光器件、镀膜基片、芯片
  3、去除金属材料表面的氧化物
  4、使玻璃、塑料、陶瓷、高聚合物等材料表面活化,增强其表面粘附性、浸润性、相容性
  5、改善粘接光学元件、光纤、生物医学材料、宇航材料等所用胶水的粘和力、高分子材料表面修饰
窗体顶端
主要特点:
1.完全彻底地清除表面有机污染物、或氧化层。
3.清洗快速、操作简便、使用和维护成本极低。
4.非破坏性、对被清洗物表面光洁度无损害。
5.绿色环保、不使用化学溶剂、无二次污染。
6.常温条件下清洗,被清洗物的温度变化微小。
7.能清洗各种几何形状、粗糙程度各异的表面。
窗体底端
 
主要技术参数:
设备型号 PD-300
清洗室 304不锈钢材料,方形腔体前开门结构,门上配有观察窗;内净尺寸约为:长*宽*高300*300*H300mm;
真空系统 机械泵/干泵抽气速度≥4升/秒+高真空阀门;
真空极限 优于5×10-1Pa; 抽速:从大气抽至10-1Pa≤10min;系统漏率复合国家标准
处理台 清洗均匀区域承载最大120*200mm方形基片;
清洗电源 功率0~300 W,数显;
数字式功率表,方便判断工作中的功率大小;
充气系统包括1-2路流量计,含进气针阀以控制清洗气体的进气流量,方便多种种不同气体按比例混合;
真空测量 配备INFICON高精度数字式真空计、规管。
控制方式 PLC+触摸屏自动控制系统,可实现无人值守一键式操作;完善的逻辑程序互锁保护及异常报警;
选配 射频清洗电源/干泵/流量计
设备配电 电压:AC220V/50HZ
功率:2.5KW
设备尺寸 长×宽×高:400*600*650mm

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